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Dr.-Ing. Remigius Poloczek

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Halbleitertechnologie

Dr.-Ing. Remigius Poloczek - Wissenschaftlicher Angestellter



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Ausgeschieden zum 01.03.2018

Campus Adresse


Kurzlebenslauf
  • Jahrgang 1978
  • Maschinenbaustudium an der RWTH-Aachen, Vertiefungsrichtung Fahrzeugtechnik mit Abschluss Dipl.-Ing.
  • Promotion an der Fakultät Elektrotechnik und Informationstechnik, Thema der Dissertation: Nanostrukturierter
    CMOS-kompatibler Drucksensor
  • Seit 2014 Postdoktorand am Lehrstuhl für Intelligente Mikrosysteme

Arbeitsgebiete

  • Halbleitertechnologie
  • Sensorsysteme/ MEMS

Lehre

  • Elektrotechnische Anwendungen und deren Realisierung in der Kraftfahrzeugtechnik

Veröffentlichungen


Bücher, Zeitschriften, Tagungsbeiträge

  • D. Merten, K. T. Kallis, F. J. Giebel,J. Zimmermann, R.P. Poloczek, H. L. Fiedler and P. Lilienthal
    „Lithography independent nanostructuring of Bi2Te3 Thermoelectric Devices“
    Proceedings of the 14th International IEEE India Council International Conference, IIT Roorkee, India 2017,
    December 15-17, in press (peer reviewed)

  • K. T. Kallis, R. R. Poloczek, M. R. Müller, M. Seiffert, S. Brabender, H. L. Fiedler and P. Glösekötter
    „On-Chip versus Off-Chip – Nanosensor Readout Strategies”
    Quantum Matter, Volume 6, Number 1, February 2017, pp. 50-53 (peer reviewed)

  • R. Poloczek, C. Kontis, K. Kallis, H. Fiedler
    "Alternative Konzepte zur Integration und zum Auslesen von Drucksensoren"
    Tagungsband zur 18. GMA/ITG-Fachtagung Sensoren und Messsysteme, Nürnberg 2016, May 10-11, pp. 797-804

  • S. Ebschke, R .R. Poloczek and K. T. Kallis
    "Beides gleichzeitig messen - Nanoskaliger Kombisensor zur simultanen Erfassung von Gasdruck und Gasfluss"
    In: chemie&more Vol. 3.14 (2014), pp 10-12

  • S. Ebschke, R .R. Poloczek, K .T. Kallis and H. L. Fiedler
    „Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit
    in Fluiden“
    ITG Fachbericht 250 zur 17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014,
    ISBN 978-3-8007-3622-5

  • S. Ebschke, R. R. Poloczek and K. T. Kallis
    „Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit
    in Fluiden“
    In: chemie&more, Vol. 3.14 (2014), pp. 10-12

  • C. Kontis, R. R. Poloczek, A. Balkenohl, H.  Schuh, K. T. Kallis and H. L.  Fiedler

    Full Complementary Metal Oxide Semiconductor Compatible Integration of Nano-Structured Absolute
    Pressure Sensors
    Journal Quantum Matter, Volume 3, Number 4, (August 2014), pp. 381-387(7)


  • C. Kontis, R. R. Poloczek, K. T. Kallis and H. L. Fiedler

    "Full CMOS-Compatible Integration of Nano-Structured Absolute Pressure Sensors"
    4th International Conference from Nanoparticles and Nanomaterials to
    Nanodevices and Nanosystems 4th IC4N-2013), Corfu, Greece 2013, June 16-20


  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Creating a monocrystalline membrane via etching and sealing of nanoholes considering its sealing behaviour"
    Journal of Nano Research Vol. 25 (2013), pp 49-54

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications"
    Proceedings of the IEEE Sensors Conference, Baltimore, Maryland, USA 2013, November 4 - November 6

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Planar technology integration of monocrystalline Silicon-membranes using nanoholes"
    Proceedings of the 13th IEEE International Conference on Nanotechnology, Beijing, China 2013, August 5 - August 8

  • R. R. Polczek, P. Filusch, K. T. Kallis and H. L. Fiedler
    "Manufacturing of cavities with monocrystalline silicon membranes for pressure sensors using annealing forming gas procedures"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011,
    Sept. 19-23


  • R. R. Poloczek, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“
    In: Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 (Sept. 2010), S. 6046-6048

  • L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    In: Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 (Sept. 2010), S. 5921-5925


  • L. O. Keller, K. T. Kallis, R. R. Poloczek, H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008

  • R. R. Poloczek, L. O. Keller, K. T. Kallis and H. L. Fiedler
    "A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region"
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008

Vorträge auf internationalen Tagungen

  • S. Ebschke, J. Zimmermann, R. R. Poloczek, K. T. Kallis, H. L. Fiedler
    "Towards a nanoscale sensor system for intra-arterial simultaneous blood flow and pressure measurement"
    EnFI 2015 Conference, Hannover, Germany 2015, July 6 - 7

  • R. R. Poloczek, K. T. Kallis, C. Kontis, M. Schneider and H. L. Fiedler
    „Membrane Stiffness Tuning for Micro-machined Pressure Sensors”
    EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07

  • K. T. Kallis, R. R. Poloczek, M. Seiffert, S. Brabender, H. L. Fiedler, P. Glösekötter
    " On-Chip vs Off-Chip -Nanosensor Readout Strategies"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30


  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit in Fluiden"
    17. ITG / GMA Fachtagung Sensoren und Messsysteme 2014, Nuremberg, Germany 2014, June 3 – June 4 

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    Planar technology integration of monocrystalline Silicon-membranes using nanoholes"
    13th IEEE International Conference on Nanotechnology, Beijing, China 2013, August 5 - August 8

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications"
    IEEE Sensors 2013, Baltimore, Maryland, USA 2013, November 4 - November 6

  • C. Kontis, K. T. Kallis, R. R Poloczek and H. L. Fiedler
    „Full CMOS-Compatible Integration of Nano-Strucured Absolute Pressure Sensors”
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16 - June 20

  • R. R. Poloczek, P. Filusch, K. T. Kallis and H. L. Fiedler
    „Manufacturing of cavities with monocrystalline silicon membranes for pressure sensors using annealing
    forming gas procedures"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011, September 19-23


Posterbeiträge auf internationalen Tagungen

  • K. T. Kallis, R. R. Poloczek, M. Seiffert, S. Brabender, H. L. Fiedler and P. Glösekötter
    „On-Chip vs Off-Chip -Nanosensor Readout Strategies”
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Porto Heli,
    Peloponnese-Greece 2016, June 26-30 (peer reviewed)

  • R. R. Poloczek, K. T. Kallis, C. Kontis, M. Schneider and H. L. Fiedler
    „Membrane Stiffness Tuning for Micro-machined Pressure Sensors”
    EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07 (peer reviewed)

  • S. Ebschke, J. Zimmermann, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Towards a nanoscale sensor system for intra-arterial simultaneous blood flow and pressure measurement”
    EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07 (peer reviewed)

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Sticking prevention of nano-structured monocrystalline silicon-membranes"
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16 - June 20

  • S. Brabender, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Wafer extension for cost-effective front to back side alignment”
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16-20

  • R. R. Poloczek, K. T. Kallis, L. O. Keller, S. Brabender and H. L. Fiedler
    „Multiple Nanolayers for optimal membrane stiffness in integrated high pressure sensors“
    2nd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2009,
    Rhodes, Greece 2009, June 28-July 03

  • L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems,
    Porto Carras, Greece 2008, June 16-18

  • R. R. Poloczek, L. O. Keller, K. T. Kallis and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems,
    Porto Carras, Greece 2008, June 16-18